LASER BEAM IRRADIATION DEVICE AND METHOD FOR LASER BEAM MACHINING

摘要

PROBLEM TO BE SOLVED: To provide a laser beam irradiation device with which the precision of positioning is improved without decreasing a scanning speed. SOLUTION: A first scanner swings the optical axis of a laser beam emitted from a laser beam source in a certain range of angle. The laser beam whose optical axis is swung by the first scanner enters a second scanner. The second scanner swings the optical axis of the entered laser beam in a certain range of angle. An object which is irradiated with the laser beam is held by a holding means at a position where the object is irradiated with the laser beam whose optical axis is swung by the second scanner.