发明名称 Method for fabricating a solid-state image sensor having an HCCD and VCCDs
摘要 A solid-state image sensor and a fabricating method thereof in which poly gates in a horizontal charge coupled device (hereinafter referred to as HCCD) are made to have different lengths to omit a barrier ion implanting process step, thus simplifying the entire process and maximizing the charge-transferring efficiency are disclosed, the solid-state image sensor having an HCCD and VCCDs including a well region of a second conductivity type formed in a semiconductor substrate of a first conductivity type; a HCCD of the first conductivity type formed on the well region of the second conductivity type; and a plurality of polygate electrodes having sequentially different lengths repeatedly formed on the semiconductor substrate.
申请公布号 US6358768(B1) 申请公布日期 2002.03.19
申请号 US19990466190 申请日期 1999.12.17
申请人 LG SEMICON CO., LTD. 发明人 PARK YONG;MOON SANG HO
分类号 H01L27/146;H01L27/148;(IPC1-7):H01L21/00 主分类号 H01L27/146
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