发明名称 Retaining ring and target and method for producing same
摘要 In order to simplify its production, a target consists of a target plate (1) and a retaining ring (2) which is mounted thereon and can be inserted in the manner of a bayonet lock into a receiving orifice of a holding device (4). A downward-facing stop (8) on the inside of the retaining ring (2), whose upper surface is flush with that of the target plate (1), cooperates with an opposite stop (7) on the latter, which is produced in a simple manner by producing an all-round step, for example by turning. The lower surface of the target plate (1) projects beyond that of the retaining ring (2), so that a metal foil (9) is pressed against its lower surface under the action of a cooling liquid under pressure, and, via the opposite stop (7) and the stop (8), presses upward-facing fastening cheeks (5) of the retaining ring (2) against retaining projections (6) of the holding device (4).
申请公布号 US6358382(B1) 申请公布日期 2002.03.19
申请号 US20000673152 申请日期 2000.11.21
申请人 UNAXIS BALZERS AKTIENGESELLSCHAFT 发明人 STUCKI HANS-ULRICH;SIEGL WOLFGANG
分类号 C23C14/34;H01J37/34;(IPC1-7):C23C14/34;B23B3/00 主分类号 C23C14/34
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