| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coater which is free from the generation of nonuniformity even when initial drying is conducted directly after a coating liquid is applied, which has a small length, which does not need a size changing structure and which can shorten tact time. SOLUTION: This slit coater possesses (1) a stage 11 composed of a surface plate, a 1st elevating pin, a 2nd elevating pin and an exhausting pipe, (2) a pressure reducing cover 12 for forming a pressure reducing chamber and (3) a slit nozzle 13 for applying the coating liquid to a base material. |
