发明名称 ULTRAVIOLET IRRADIATION DEVICE AND METHOD FOR CONTROLLING ULTRAVIOLET-LIGHT IRRADIATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device which is capable of monitoring the operating state of an ultraviolet irradiation lamp in a real-time mode without interrupting the irradiation work by measuring the concentration of the ozone, present in a gas, which is generated by the ultraviolet irradiation as well as a method for adjusting/controlling the power of the ultraviolet irradiation lamp based on the measured concentration of the ozone. SOLUTION: The ozone, present in a gas contained inside a body case 4, which is generated by ultraviolet irradiation, is sampled using an intake pipe 5 and the operating state of the ultraviolet irradiation lamp 1 is indicated in a state indicator 7 by measuring the ozone concentration with the help of an ozone concentration measuring instrument 6. Further, the measured ozone concentration is converted to an electric signal through a converter 8 and the power of the ultraviolet irradiation lamp 1 is adjusted/controlled with the assistance of a power supply controller 9 based on the signal. Consequently, it is possible to operate the device extremely efficiently and ensure the qualitative stability and further, replace the ultraviolet irradiation lamp 1 in an appropriately timely manner.
申请公布号 JP2002079203(A) 申请公布日期 2002.03.19
申请号 JP20000270957 申请日期 2000.09.07
申请人 TECHNO PLEX:KK 发明人 TOKUMURA KATSUYA
分类号 B08B7/00;H01L21/304;(IPC1-7):B08B7/00 主分类号 B08B7/00
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