| 摘要 |
A vibration change is detected by a touch signal probe having a vibrator (16) composed of a stylus support (10) and a stylus (13) attached thereto, and a vibrating/detecting means (12) provided to the stylus support (10) for applying vibration to the vibrator (16) and detecting a vibration condition changing when the stylus (13) touches a workpiece. The vibrator (16) is vibrated at a frequency equivalent to secondary intrinsic frequency (w2) to make resonance and the vibration change is detected by superposing a vibration component of primary intrinsic frequency (w1). Though the vibration at the secondary intrinsic frequency (w2) has high Q value, response amplitude is small. Accordingly, the vibration change is amplified by superposing the vibration component of the primary intrinsic frequency (w1).
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