发明名称 CORROSION RESISTANT MEMBER
摘要 PROBLEM TO BE SOLVED: To solve the problem that a corrosion resistant material jointed on a surface of a ceramic base material is likely to come off and poor in corrosion resistance. SOLUTION: The corrosion resistant member 1 is made by joining the corrosion resistant material 3 made of a sintered compact, the main ingredient of which is at least one kind between 2a group or 3a group of the periodic system, on a surface of the ceramic base material 2 made of an aluminum oxide sintered compact. The middle layer 4 made of a sintered compact containing the ingredient of the ceramic base material 2 and the ingredient of the corrosion resistant material 3 is provided between the ceramic base material 2 and the corrosion resistant material 3.
申请公布号 JP2002080270(A) 申请公布日期 2002.03.19
申请号 JP20000250110 申请日期 2000.08.21
申请人 KYOCERA CORP 发明人 HAMADA TOSHIYUKI;NAKAHARA MASAHIRO
分类号 H05H1/46;C04B35/00;C04B35/10;C04B37/00;C23C16/44;H01L21/205;H01L21/302;H01L21/3065 主分类号 H05H1/46
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