发明名称 Capacitor of semiconductor device and method of fabricating the same
摘要 A capacitor of a semiconductor device is provided which includes a semiconductor substrate, an insulating interlayer formed on the semiconductor substrate, the insulating interlayer having a contact hole which exposes a predetermined portion of the semiconductor substrate, a plug filled in the contact hole, the plug coming into contact with the semiconductor substrate, a contact layer formed on the insulating interlayer, the contact layer coming into contact with the plug, first and second barrier layers formed on the surface and sides of the contact layer, a lower electrode formed on the first barrier layer, a dielectric layer formed on the second barrier layer and lower electrode, and a upper electrode formed on the dielectric layer.
申请公布号 US6358794(B1) 申请公布日期 2002.03.19
申请号 US19990383232 申请日期 1999.08.26
申请人 HYUNDAI MICROELECTRONICS, CO., LTD. 发明人 OH KI-YOUNG
分类号 H01L27/04;H01L21/02;H01L21/285;H01L27/108;(IPC1-7):H01L21/824 主分类号 H01L27/04
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