Leakage testing tool for a bellow of a semiconductor manufacturing machine

摘要

The invention is a leakage testing tool for a bellow of a semiconductor manufacturing machine. The testing tool has a plate, a first rack and an opposite second rack, both racks formed on the plate and supporting the bellow. Two movable plates each engage with a respective one of two adjustment screws. Each adjustment screw can adjust a flat end of one of the movable plates to press on a respective one of two end flanges of the bellow. With the testing tool, whether a bellow is damages can be quickly and conveniently determined, whereby a significant low cost is achieved.