发明名称 MIS transistor and method of fabricating the same
摘要 Grooves are formed in side walls to be adjacent to a gate electrode. Thereafter a silicide film is formed on a surface of the gate electrode. Thus, the gate electrode is prevented from electrical connection with a source/drain layer resulting from formation of silicide films on surfaces thereof, and its resistance value is prevented from being increased by the silicide films hardly causing phase transition following refinement.
申请公布号 US6359321(B2) 申请公布日期 2002.03.19
申请号 US19970874410 申请日期 1997.06.13
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 SHIMIZU SATOSHI;ODA HIDEKAZU
分类号 H01L21/28;H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119;H01L27/088 主分类号 H01L21/28
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