发明名称 Vertical PNP bipolar transistor and its method of fabrication
摘要 A bipolar vertical PNP transistor compatible with CMOS processing and useful in a complementary BiMOS structure is characterized in that it is devoid of an epitaxial layer and employs a high-energy implanted phosphorus layer to provide N-type substrate isolation.
申请公布号 US6359317(B1) 申请公布日期 2002.03.19
申请号 US19980222587 申请日期 1998.12.28
申请人 AGERE SYSTEMS GUARDIAN CORP. 发明人 CARROLL MICHAEL S.;CHYAN YIH-FENG;CHAUDHRY SAMIR;IVANOV TONY G.;DAIL ROBERT W.;CHEN ALAN S.
分类号 H01L21/331;H01L21/8249;H01L27/06;H01L29/732;(IPC1-7):H01L29/76;H01L29/94 主分类号 H01L21/331
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