发明名称 |
Touchless stabilizer for processing spherical devices |
摘要 |
A method for securing a device, such as a spherical shaped semiconductor integrated circuit, for fabrication. An apparatus includes a plenum having an input and several outputs. The input of the plenum is connected to a pressurized fluid source. The outputs are separated into two groups: a centralized output and several peripheral outputs. The outputs connects to apertures located on a top surface of the apparatus. The centralized apertures expel the pressurized fluid from the fluid source to suspend the spherical shaped semiconductor integrated circuit device above the top surface. The peripheral apertures expel the pressurized fluid from the fluid source to secure the device above the centralized apertures.
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申请公布号 |
US6358288(B1) |
申请公布日期 |
2002.03.19 |
申请号 |
US19990418157 |
申请日期 |
1999.10.13 |
申请人 |
BALL SEMICONDUCTOR, INC. |
发明人 |
KASIM RAMESH K.;RAMAMURTHI RAM |
分类号 |
C30B33/00;C30B35/00;H01L21/68;H01L21/683;(IPC1-7):H01L21/00;H01L21/64;C30B28/08;B05C11/00;B05C13/00 |
主分类号 |
C30B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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