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发明名称
GAS DISTRIBUTION SYSTEM
摘要
申请公布号
SG87112(A1)
申请公布日期
2002.03.19
申请号
SG20000002470
申请日期
2000.05.09
申请人
SILICON VALLEY GROUP, THERMAL SYSTEMS LLC
发明人
LAWRENCE DUANE BARTHOLOMEW;SOON K. YUH;GREGORY MARK STUMBO;MARK B. KING;JEFFREY CHAN
分类号
H01L21/205;C23C16/44;C23C16/448;C23C16/455;(IPC1-7):C23C16/00
主分类号
H01L21/205
代理机构
代理人
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