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发明名称
摘要
申请公布号	JP3266076(B2)	申请公布日期	2002.03.18
申请号	JP19970302261	申请日期	1997.11.04
申请人		发明人
分类号	H05H1/46;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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