DEVICE AND METHOD FOR SEPARATING SAMPLE

摘要

PROBLEM TO BE SOLVED: To appropriately separate a laminating substrate by a simple device. SOLUTION: A separation layer comprises a pair of substrate retention sections 105 and 106 that have the separation layer inside for retaining the laminating substrate 50 having a recess outside the separation layer, and a de Laval nozzle 120 that jets out a supersonic gas toward the recess of the laminating substrate 50. The diameter of the supersonic gas jetted out of the de Laval nozzle 120 is smaller than the width of the recess.