| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source that generates an ion beam having a large effective diameter with an ion beam current density of 10 mA/cm2 or more, an ion beam uniformity of ±3% or less and a reproducibility (change with the passage of time) of ion beam current density of ±1% or less. SOLUTION: This ion source comprises plural hot cathodes, a positive electrode, a magnet arranged so as to surround the outside of the positive electrode, an inert gas inlet pipe, a shielding electrode that is arranged at the ion taking out portion and has plural thin holes, and an accelerating electrode having plural thin holes of the same shape, and further comprises a shield plate that suppresses the temperature rise and heat distortion of the shielding electrode and a cooling jacket that is directly mounted on the accelerating electrode, shielding electrode and ion source body for cooling each of them respectively. |
