| 摘要 |
PROBLEM TO BE SOLVED: To enables it to perform selection of driving or not driving of a load in a high-voltage terminal of an ion beam accelerator without using an optical signal from outside. SOLUTION: A generator arranged in the high-voltage terminal of the accelerator is driven through an insulated rod with an output of a motor arranged in the ground electric potential section. A meter relay, which closes a contact MTa when the output voltage of the generator is within a set range, is prepared, and the voltage is impressed to the timer relay T through the contact Mta. When the timer relay T competes a time limit ration, relay MY is magnetically excited, and a contact point MYa2 is closed, and a turbo molecule pump 304 which is a load, is driven. By choosing the change pattern of the voltage at the time of raising the output voltage of the generator, the driving or the not driving of the load is chosen by exciting or not exiting the relay MY.
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