发明名称 METHOD FOR MAKING A PLANAR WAVEGUIDE
摘要 The present invention is a method for making planar waveguides. The method comprises the steps of providing a workpiece comprising a layer of material suitable for the waveguide strip; patterning the layer so that the workpiece comprises a base portion and the at least one protruding portion; farming a cladding layer on the protruding portion; and attaching the claddi ng layer to a substrate. Depending on the composition of the workpiece, the process may further require removing the base portion to expose the bottom surface of the protruding portion. With this method, a planar waveguide or a planar waveguide amplifier may be fabricated having thickness dimensions greater than 5 .mu.m, or more preferably, in the range of 10-20 .mu.m.</SDOA B>
申请公布号 CA2352919(A1) 申请公布日期 2002.03.15
申请号 CA20012352919 申请日期 2001.07.11
申请人 AGERE SYSTEMS OPTOELECTRONICS GUARDIAN CORP. 发明人 SHMULOVICH, JOSEPH
分类号 G02B6/12;G02B6/13;G02B6/136;G02B6/28;H01S3/063;(IPC1-7):G02B6/13;G02B6/122;H04B10/12 主分类号 G02B6/12
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