| 摘要 |
PROBLEM TO BE SOLVED: To increase the nondefective product obtaining efficiency, in a wafer probe characteristic inspection. SOLUTION: A semiconductor IC comprises at least three series of logic circuits (71, 72, 73, 74, 75, 76), which have the same configuration and are supplied with a common input signal, and a majority circuit (77) which decides, as an output logic, a logic which is largest in number among the output logics of the logic circuits. Even when parts of those logic circuits are at fault, a correct value is obtained by the majority circuit. Consequently, the nondefective product obtaining efficiency is increased in a wafer probe characteristic inspection.
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