发明名称 |
ROTATION-STOPPING DEVICE AND PROFILE-FOLLOWING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To make processing and fabrication simple and reduce manufacturing cost. SOLUTION: Right above an oscillating body 20, each of blocks 41-43 is connectedly located on an axis Z. A first protrusion 41a formed on the lower block 41 is engaged with a second groove 42a formed on the middle block 42 slidably. A second protrusion 43a formed on the upper block 43 is engaged with a second groove 42b formed on the middle block 42 slidably.
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申请公布号 |
JP2002076030(A) |
申请公布日期 |
2002.03.15 |
申请号 |
JP20000254583 |
申请日期 |
2000.08.24 |
申请人 |
CKD CORP |
发明人 |
UCHIDA KOJI;ITO HIDEKAZU;NAKAMURA SEIJI;SHIMOYAMA TATSURO |
分类号 |
H01L21/52;(IPC1-7):H01L21/52 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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