发明名称 ROTATION-STOPPING DEVICE AND PROFILE-FOLLOWING APPARATUS
摘要 PROBLEM TO BE SOLVED: To make processing and fabrication simple and reduce manufacturing cost. SOLUTION: Right above an oscillating body 20, each of blocks 41-43 is connectedly located on an axis Z. A first protrusion 41a formed on the lower block 41 is engaged with a second groove 42a formed on the middle block 42 slidably. A second protrusion 43a formed on the upper block 43 is engaged with a second groove 42b formed on the middle block 42 slidably.
申请公布号 JP2002076030(A) 申请公布日期 2002.03.15
申请号 JP20000254583 申请日期 2000.08.24
申请人 CKD CORP 发明人 UCHIDA KOJI;ITO HIDEKAZU;NAKAMURA SEIJI;SHIMOYAMA TATSURO
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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