发明名称 ETCHING LIQUID COMPOSITION
摘要 PURPOSE: An etching liquid for transparent electrode films of LCDs and other display elements is provided. CONSTITUTION: The etching liquid composition comprises an etching liquid for transparent conducting films and one or more compounds selected from the group consisting of polysulfonic acid compounds and polyoxyethylene-polyoxypropylene block copolymers.
申请公布号 KR20020020654(A) 申请公布日期 2002.03.15
申请号 KR20010055280 申请日期 2001.09.08
申请人 KANTO KAGAKU KABUSIKI KAISH 发明人 ISHIKAWA NORIO;MORI KIYOTO
分类号 C23F1/14;C09K13/00;H01L21/3213;H01L31/18;(IPC1-7):C23F1/14 主分类号 C23F1/14
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