| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a light emitting substrate capable of forming a layer containing a nano particule iron silicide on a surface region in a simple manufacturing process and a light emitting element manufactured by using this method. SOLUTION: The method for manufacturing the light emitting substrate comprises the steps of immersing a silicon substrate 1 using a surface (111) as a substrate surface in alcohol suspension of iron oxide (Fe2O3) nano particles having a particle size of 3 to 15 nm, adhering the nano particles 2 to the substrate 1, then heating the substrate 1 to 850 to 900 deg.C in a molecular beam epitaxially growing unit to reduce the particles 2 to form an iron nano particles 3, thereafter setting the substrate 1 to 520 deg.C, and depositing silicon atoms in 2 nm from a K cell source heated to 1,200 deg.C to form the light emitting substrate of a state in which iron silicide nano particles 4 are embedded in a silicon cover layer 5. |
