| 摘要 |
PROBLEM TO BE SOLVED: To improve a recognition process thereafter by matching after a recognition error takes place to change a recognition region for a second-time recognition process. SOLUTION: The movement amount of an XY table 4 is decided by completion of matching, and a CPU21 changes a positional offset stored in a RAM22 based on the movement amount. A recognition search range 48 is narrowed for each mark, for a second-time recognition process. If the result of re-run is 'OK', a coordinate is decided and an image information is extracted. The displacement amount for each mark is calculated by a CPU31, and determination of the coordinate decides a correction amount of an attaching position. These are stored in the RAM22 as a control information data, and a part 10 is mounted on a substrate 5 after correction at the attaching operation thereafter. At recognizing process of other substrates 5 thereafter, the size and position where the search range is narrowed are stored in the RAM22 as a new search range for use. |
