| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary driving device which suppresses the influence of a temperature change during driving, and to provide a device for preparing a master plate using the same. SOLUTION: The rotary driving device which is used in a vacuum atmosphere is provided with a housing, a spindle shaft which is housed while exposing at least one end from the housing, supported freely rotatably by a bearing, and carries the master plate, a motor to rotationally drive the spindle shaft and a magnetic fluid seal which interposes in the gap between, the housing and the spindle shaft. The rotary driving device has, furthermore, a temperature sensor and an electric heater disposed near the magnetic fluid seal and the motor, and a temperature controller to control the electric heater on the basis of the output of the temperature sensor.
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