摘要 |
PROBLEM TO BE SOLVED: To provide an LED array for enhancing the light emitting intensity of each element. SOLUTION: The LED array comprises a one conductivity buffer layer 10, an insertion layer 22, one conductivity semiconductor clad layer 12, a reverse conductivity semiconductor active layer 13 and a reverse conductivity semiconductor clad layer 14 sequentially laminated on one main surface of a semiconductor substrate 9. Further, the LED array comprises a reverse conductivity contact layer 15 and one electrode 16 sequentially laminated near an end on the layer 14. The LED array also comprises another electrode 17 formed on another main surface of the substrate 9. In this case, the etching rate of the layer 11 is larger than those of both layer 10 and the layer 12. |