发明名称 MAGNETIC SHIELD LAYER THICKNESS DETECTOR AND DETECTING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To obtain a magnetic shield layer thickness detector for detecting the existence and the film thickness of the magnetic shield layer when coating a magnetic shield coating liquid on the surface of a base film, utilizing the Hall effect of a semiconductor Hall element. SOLUTION: The magnetic shield layer thickness detector for detecting a magnetic shield layer formed by coating a magnetic shield material on the surface of a base film 19 detects the existence and the film thickness of the shield layer from a magnetic detection output of a magnetic detector element. The detector is composed of a magnet 2, the magnetic detector element 11 and an amplifier 16. The magnet 12 and the detector element 11 are held with a specified distance, the amplifier 16 is connected to the detector element 11 to amplify the detection output from the detector element 11, and the base film 19 having a shield layer formed thereon passes in a plane facing the magnet and the detector element, without contacting them.
申请公布号 JP2002076469(A) 申请公布日期 2002.03.15
申请号 JP20000260789 申请日期 2000.08.30
申请人 TOKIN CORP 发明人 INO AKIRA
分类号 H01L43/06;H01L43/08;H01L43/12;(IPC1-7):H01L43/06 主分类号 H01L43/06
代理机构 代理人
主权项
地址