发明名称 DEVICE AND METHOD FOR SEPARATING SAMPLE
摘要 PROBLEM TO BE SOLVED: To properly separate a sample such as a laminating substrate or a composite member. SOLUTION: This separating device 500 has a wedged nozzle 503 that jets out fluid, and an air cylinder 505 that allows the wedged nozzle 503 to come into contact with the laminating substrate 50 or inserts the wedged nozzle 503 into the laminating substrate 50. While the wedged nozzle 503 is brought into contact with the laminating substrate 50, or is inserted into the laminating substrate 50, the fluid is jetted out of the wedged nozzle 503, thus separating the laminating substrate 50 in a porous layer.
申请公布号 JP2002075915(A) 申请公布日期 2002.03.15
申请号 JP20000256134 申请日期 2000.08.25
申请人 CANON INC 发明人 YANAGIDA KAZUTAKA;SAKAGUCHI KIYOBUMI
分类号 B23P17/00;H01L21/00;H01L21/02;H01L21/301;H01L21/336;H01L21/76;H01L21/762;H01L27/12;H01L29/786;(IPC1-7):H01L21/301 主分类号 B23P17/00
代理机构 代理人
主权项
地址