发明名称 UNIFORMLY HEATING METHOD FOR CIRCULAR PLATE-FORM WORKPIECE
摘要 PROBLEM TO BE SOLVED: To provide a uniform heating method for heating a circular plate-form workpiece with uniform distribution of temperature and superior heating efficiency. SOLUTION: In the method in which a circular plate-form workpiece 1 is heated uniformly at temperatures with a lamp 3, one or more annular lamps are provided with its annular shape in parallel with the flat face of the plate- form workpiece, and a tube-shaped reflective body 4 is provided concentrically around the circumference of the lamp or the lamp group. On both sides of the plate-form workpiece, one or more circular lamps in parallel with their annular faces are provided, and a tube-shaped body is provided concentrically around the outer circumference of the lamp group facing both the sides of the workpiece.
申请公布号 JP2002075899(A) 申请公布日期 2002.03.15
申请号 JP20000262763 申请日期 2000.08.31
申请人 ULVAC-RIKO INC 发明人 AZUMI TADAHIKO
分类号 C23C14/50;C23C16/46;F27D11/02;H01L21/26;(IPC1-7):H01L21/26 主分类号 C23C14/50
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