FLUORINE LASER DEVICE AND EXPOSURE DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a highly efficient fluorine laser device of stably output capable of high repetition. SOLUTION: This fluorine laser device provided with discharge electrodes (4 and 5) for causing main discharge (50) and stimulating laser gas containing fluorine is provided with a hallow discharge tube (12) for enclosing the laser gas in the inside, the discharge electrodes (4 and 5) arranged at both ends of the discharge tube (12) for performing the main discharge (50) in almost the same direction as the optical axis of an oscillating laser beam (11) and a standby ionization electrode (10) composed of a conductor on the surface on the opposite side of the surface where the laser gas to be stimulated is in contact of the discharge tube (12).