发明名称 INSPECTION DEVICE FOR PRINTED BOARD
摘要 PROBLEM TO BE SOLVED: To provide an inspection device for a printed board where the printed board is surely held at an inspection stage for improved inspection precision. SOLUTION: After a printed board 1 is electrostatically adsorbed to a holding surface of an inspection stage 2, the printed board 1 is processed for squeezing and removing foreign substance by a squeegee part 5. A detection part 6 detects defect of a wiring pattern 11 based on the image data acquired by imaging the printed board 1 using an imaging part 4.
申请公布号 JP2002076569(A) 申请公布日期 2002.03.15
申请号 JP20000260600 申请日期 2000.08.30
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 SUMIOKA TSUTOMU;TAMADA ATSUSHI
分类号 G01N21/956;H05K3/00;(IPC1-7):H05K3/00 主分类号 G01N21/956
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