METHOD OF MANUFACTURING INFORMATION RECORDING MEDIUM AND SUBSTRATE HOLDER STRUCTURE AS WELL AS DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To manufacture an information recording medium which is little in warp and distortion by suppressing the temperature rise of substrates during deposition by sputtering relating to a method of manufacturing the information recording medium and a substrate holder structure as well as a deposition apparatus. SOLUTION: A sheet 10 having insulating properties is previously inserted between a substrate 1 and a holding surface 2A in mounting the substrate 1 to a holder 2 having a holding surface 2A for holding the substrate and consisting of metal or alloy.