| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a means which can cut off a Faraday rotor having one side of 1.6 mm or smaller in size from a manufactured rare-earth-iron-garnet single-crystal film with high yield. SOLUTION: The rare-earth-iron-garnet single-crystal film is stuck to an adhesive tape, which has an adhesive strength of >=1,500 g/25 mm, when measured by the measuring method prescribed in JIS Z0237 and releases the film, when the tape is irradiated with ultraviolet rays and cut into thin pieces with a peripheral cutting edge type dicing machine under a condition, where the cooling water for the cutting edge of the machine is supplied at a rate of 0.8-1.5 l/min and the cutting speed of the cutting edge is adjusted to 0.2-0.6 mm/see. Consequently, the occurrence of cutting defects (including chip scattering, chipping defects, and size defects) can be suppressed significantly.</p> |
