METHOD OF FORMING OHMIC ELECTRODE ON DIAMOND AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an ohmic electrode that makes a good ohmic contact on diamond. SOLUTION: After a diamond like carbon film 2 is formed on a diamond substrate 1, the diamond like carbon film 2 is heat-treated in a hydrogen atmosphere, and a metal film is formed on the heat-treated diamond like carbon film 2 to be an electrode 3. By forming the electrode after forming the diamond like carbon film 2 by the heat-treatment in the hydrogen atmosphere, the ohmic contact characteristic of the electrode 3 is remarkably improved.