TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a new impurity co-added zinc oxide(ZnO) transparent conductive film, and target materials and patterning technique used to manufacture the thin film so as to easily control chemical characteristics of ZnO base transparent conductive film without remarkably spoiling visible light transmittance and electrical resistivity by co-adding to ZnO one or more sorts of donor impurities and chromium(Cr) at the same time. SOLUTION: The transparent conductive film is formed by employing the impurity co-added ZnO film which contains one or more sorts of donor impurities (for example, Al from Al2O3 powders used as a raw material which is added to Zn by about 3 at.%) and Cr from chromium oxide(CrO2) powder used as a raw material of 0.1 to 10 at.% to Zn, preferably ranging 1 to 5 at.%, which are co-added to ZnO.