METHOD AND APPARATUS FOR CONTROLLING TEMPERATURE OF SAMPLE STAGE, AND METHOD AND APPARATUS FOR PROCESSING SAMPLE

摘要

PROBLEM TO BE SOLVED: To control a temperature distribution inside the surface of a sample so as to uniformly process the sample. SOLUTION: A plurality of coolant channels inside of a sample stage are connected in series to change the temperature of a coolant at the connected portions among the coolant channels, and the coolant is supplied to a next coolant channel. The temperature of the coolant sent out of the coolant channel is returned to the original temperature. The coolant returned to the original temperature is sent back to an original coolant channel to be circulated in a plurality of coolant channels.