| 摘要 |
PROBLEM TO BE SOLVED: To measure a capacitance of a capacitor accurately and quickly. SOLUTION: This invention is a method for measuring the capacitance of a capacitor comprising first region 201 formed of a semiconductor or a conductor, insulation film 205 formed on this first region, and a conductive second region 206 formed on this insulation film. The measuring method comprises a process of measuring capacitance and loss as changing bias voltage sequentially applied on the capacitor at plural frequencies under each bias voltage, and a process of searching for compensated capacitance sequentially under each bias voltage based on the measured values of capacitance and loss at plural frequencies.
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