METHOD OF PREPARING CARBON NANOTUBE UNDER VAPOR-PHASE CONDITION

摘要

PURPOSE: A method of preparing carbon nanotube under vapor-phase condition is provided, in which high voltage is discharged in a reactor containing catalyst and hydrogen carbon gas under a pressure of 500 to 3000torr to generate plasma. CONSTITUTION: After supplying a rinsing gas through a mass flow controller(1a), hydrocarbon source is supplied through mass flow controllers(1b,1c), where the hydrocarbon source is introduced into a reactor(4) after its impurities are eliminated as passing through a water bath(4). While solid catalyst(7) is put in the reactor in advance, the solid catalyst is changed into gas phase by heating the solid catalyst at a temperature range of 260 to 600deg.C as supplying hydrocarbon gas. After the solid catalyst is changed enough into gas phase, an alternating current of 10 to 20KV is applied to an electrode(5) connected to the reactor under a pressure range of 500 to 3000 torr to generate plasma in hydrocarbon gas.