Liquid crystal display device, manufacturing method thereof, and fabrication apparatus therefor

摘要

The present invention provides a liquid crystal display device, each of gate terminals of which has a laminated structure formed of an aluminum alloy thin film and a molybdenum alloy thin film stacked on the aluminum alloy thin film, and forms respective gate lines by converting the molybdenum alloy thin film of the laminated structure into an aluminum oxide thin film in a effective displaying area of the liquid crystal display device. According to the present invention, any displaying errors of the liquid crystal display device caused by deterioration of insulation between wiring patterns formed therein (like the gate lines) during manufacturing processes thereof will be avoided without adding any fabrication steps to the manufacturing processes thereof.