METHOD AND APPARATUS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
摘要
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
申请公布号
WO0171779(A3)
申请公布日期
2002.03.14
申请号
WO2001US08746
申请日期
2001.03.16
申请人
FORMFACTOR, INC.;MATHIEU, GAETAN, L.;ELDRIDGE, BENJAMIN, N.;GRUBE, GARY, W.
发明人
MATHIEU, GAETAN, L.;ELDRIDGE, BENJAMIN, N.;GRUBE, GARY, W.