VACUUM GAP DIELECTRIC FIELD EMISSION TRIODE

摘要

A vacuum gap dielectric field emission triode and a method of fabrication include a conductive layer (21) positioned on a supporting substrate (20) and an emitter (25) positioned on the conductive layer. A gate metal layer electrically separated from the conductive layer defines a metal bridge gate (35) surrounding the emitter and separated from the emitter by a substantially fixed distance. The gate metal layer defines a gate opening (30) through the metal bridge gate overlying the emitter. An anode (45) is positioned in spaced relationship to the gate metal layer and the triode is sealed in a substantial vacuum so that the emitter is separated from the metal bridge by the substantial vacuum and the metal bridge is separated from the anode by the substantial vacuum.