| 摘要 |
<p>An imaging system comprises a cylindrical lens (CL) for focusing only the component in one direction of a light beam emitted from a light source (1) in a cross-section perpendicular to the direction of the travel of the light beam, an objective lens (OL) which the light beam emerging from the cylindrical lens (CL) enters after passing through the focal point, and a galvano mirror (3a) disposed at the focal point on the optical path between the cylindrical lens (CL) and the objective lens (OL). Light reflected from a sample (S) in response to a slit-like light beam impinging onto the sample (S) is picked up by means of a TV camera (7).</p> |
