发明名称 PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 PURPOSE: To provide a piezoelectric device of a structure where the device is strong against shocks from the outside and stresses to work on a piezoelectric vibrating piece and a continuity between the sides of electrodes on a package base and the vibrating piece can be improved, and to provide a manufacturing method of the device. CONSTITUTION: A piezoelectric device, having a structure where a piezoelectric vibrating piece 11 is bonded to mounting electrodes 44 and 44 provided on a package base 42, is provided with the mounting electrodes 44 and 44, which are provided on the base 42 are led to a drive voltage via continuity parts 44b and at the same time, are mounted with the piezoelectric vibrating piece 11; conductive anchor members 41 and 41, which are arranged on the surfaces of the electrodes 44 and 44 and are formed of a material having high adhesion to the surfaces of these electrodes 44 and 44; and the piezoelectric vibrating piece 11 is bonded to the upper parts of these members 41 and 41 via silicon conductive bonding agents 15 and 15.
申请公布号 KR20020020202(A) 申请公布日期 2002.03.14
申请号 KR20010054396 申请日期 2001.09.05
申请人 SEIKO EPSON CORPORATION 发明人 SERIZAWA SATOSHI
分类号 H01L23/12;H01L21/52;H01L41/053;H01L41/09;H01L41/22;H01L41/23;H01L41/313;H03H3/02;H03H9/02;H03H9/05;H03H9/10 主分类号 H01L23/12
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