发明名称 OBJECT LENS SYSTEM, OBSERVING DEVICE EQUIPPED WITH THE OBJECT LENS SYSTEM, AND EXPOSURE SYSTEM EQUIPPED WITH THE OBSERVING DEVICE
摘要 <p>A method of producing an object lens system capable of satisfactorily minimizing remaining wave front aberration higher-order components. The method of producing an object lens system (7) comprises the step of producing respective optical members constituting an object lens system by minimizing, in order to minimize wave front aberration higher-order components remaining in an object lens system, the wave front aberration, due to a refractive index distribution, of respective optical members, and wave front aberration, with respect to a reference plane, of respective planes of respective optical members, and the step of optically adjusting an object lens system for the purpose of correcting aberration remaining in an assembled objective lens system.</p>
申请公布号 WO2002021187(P1) 申请公布日期 2002.03.14
申请号 JP2001007715 申请日期 2001.09.05
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