发明名称 |
Light emitting device, method of manufacturing the same, and thin film forming apparatus |
摘要 |
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a first transferring chamber. The plural film forming chambers include a metal material evaporation chamber, an EL layer forming chamber, a sputtering chamber, a CVD chamber, and a sealing chamber. By using this thin film forming apparatus, an upward emission type EL element can be fabricated without exposing the element to the outside air. As a result, a highly reliable light emitting device is obtained.
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申请公布号 |
US2002030443(A1) |
申请公布日期 |
2002.03.14 |
申请号 |
US20010947562 |
申请日期 |
2001.09.07 |
申请人 |
KONUMA TOSHIMITSU;YAMAZAKI HIROKO |
发明人 |
KONUMA TOSHIMITSU;YAMAZAKI HIROKO |
分类号 |
H01L27/32;H01L51/56;(IPC1-7):H01J63/04;H05B33/00 |
主分类号 |
H01L27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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