发明名称 Method of manufacturing electron-emitting element and electronic device
摘要 A method of manufacturing an electron-emitting element (20) for emitting electrons from diamond includes the first step of forming a diamond columnar member (25) on a diamond substrate (21), and the second step of forming an electron-emitting portion (30) having a base portion (36) and a sharp-pointed portion (32) which is located closer to a distal end side than the base portion (36) and emits the electrons by performing etching processing with respect to the columnar member (25).
申请公布号 US2002031913(A1) 申请公布日期 2002.03.14
申请号 US20010942101 申请日期 2001.08.30
申请人 NISHIBAYASHI YOSHIKI;ANDO YUTAKA;MEGURO KIICHI;IMAI TAKAHIRO 发明人 NISHIBAYASHI YOSHIKI;ANDO YUTAKA;MEGURO KIICHI;IMAI TAKAHIRO
分类号 H01J1/304;H01J9/02;(IPC1-7):H01L21/302;H01L21/461 主分类号 H01J1/304
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