发明名称 |
Method of manufacturing electron-emitting element and electronic device |
摘要 |
A method of manufacturing an electron-emitting element (20) for emitting electrons from diamond includes the first step of forming a diamond columnar member (25) on a diamond substrate (21), and the second step of forming an electron-emitting portion (30) having a base portion (36) and a sharp-pointed portion (32) which is located closer to a distal end side than the base portion (36) and emits the electrons by performing etching processing with respect to the columnar member (25).
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申请公布号 |
US2002031913(A1) |
申请公布日期 |
2002.03.14 |
申请号 |
US20010942101 |
申请日期 |
2001.08.30 |
申请人 |
NISHIBAYASHI YOSHIKI;ANDO YUTAKA;MEGURO KIICHI;IMAI TAKAHIRO |
发明人 |
NISHIBAYASHI YOSHIKI;ANDO YUTAKA;MEGURO KIICHI;IMAI TAKAHIRO |
分类号 |
H01J1/304;H01J9/02;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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