摘要 |
The invention relates to a device, to a set of tubes and to a method for carrying a gas or a liquid to a surface through a tube, especially in order to produce gas mixtures or to treat the surface using gas lithography. The tube or in the case of a set, each tube of the set has an inlet opening and an outlet opening. A shaft is allocated to each tube, this shaft being arranged in the axial direction of the tube and being displaceable in its longitudinal direction in relation to the tube, from a first position to a second position and vice versa. Each shaft bears a blocking body which blocks or unblocks the outlet when the shaft is in the first or second position. A gas reservoir and a supply line by which means the inside of the gas reservoir is connected to the inlet opening of each tube are also allocated to each tube, so that gas is able to flow from the inside of the gas reservoir into the tube.
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