发明名称 Method of forming patterned thin film and method of forming magnetic pole of thin-film magnetic head
摘要 A method of forming a patterned thin film and a method of forming a magnetic pole of a thin-film magnetic head according to the invention comprise the steps of: forming a convex first patterned layer made of a first material on an electrode film that serves as a conductive base; forming a second patterned layer to be a frame, made of a nonconductive second material different from the first material, on the electrode film around the first patterned layer; making the second patterned layer into a frame by removing the first patterned layer, the frame having a groove formed by the removal of the first patterned layer; and forming a patterned thin film (pole portion layer) in the groove of the frame.
申请公布号 US2002031727(A1) 申请公布日期 2002.03.14
申请号 US20010921581 申请日期 2001.08.06
申请人 TDK CORPORATION 发明人 ASANUMA YUJI
分类号 G11B5/31;(IPC1-7):G03F7/00 主分类号 G11B5/31
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