| 摘要 |
<p>A system and method for using a portable enclosure system for conducting on-site demonstrations of semiconductor processing operations or as a temporary clean room. A vehicle transports an environmentally-controlled enclosure including a semiconductor processing workspace, preparation area, and entrance area, from a first location to a second location. An air suspension device and trailer are included in one embodiment. Air suspension devices and an enclosed truck are included in another embodiment. In yet another embodiment, the environmentally-controlled enclosure system includes a viewing mechanism, which allows for visual inspection of the internal portion of the enclosure from outside of the controlled environment, especially advantageous during demonstrations.</p> |
