| 摘要 |
There is provided a method for measuring positions of a plurality of thin film magnetic head elements formed in a line on a bar optically, efficiently, quickly and with high accuracy. The method includes the steps of: in order that the measured result is fed back to the manufacturing step to stabilize the manufacturing process of the thin film magnetic head elements, obtaining the estimated quantity of positions of samples in the bar from the elements, the amount of deviation in position of the next element, and the distance between the elements, and estimating them by a primary approximate linear or several-order approximate curve, moving the estimated amount and the distance between the elements simultaneously, and photo-converting an image formed by a lens optical system to convert it to an image signal; and computing dimensions, wherein the conversion step is carried out immediately after movement of the next element and is continuously repeated, and the computing step is processed in parallel with the step for converting to the image signal. Thereby, it is possible to measure an image with high precision, high stabilization and high resolution to enable measurement with high accuracy of a narrow track width of GMR head.
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