发明名称 |
Vorrichtung zur Kristallhaltung |
摘要 |
In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a monocrystal is held by holding portions of a lifting jig during a monocrystal growth process in which the seed crystal is brought into contact with material melt and is subsequently pulled while being rotated. In the crystal holding apparatus, an attachment member for establishing surface contact with the corrugated portion of the crystal is attached to the tip end of each holding portion of the lifting jig. Therefore, the monocrystal can be held reliably, so that the breaking and falling down of the monocrystal during the pulling operation can be prevented. |
申请公布号 |
DE69801069(T2) |
申请公布日期 |
2002.03.14 |
申请号 |
DE1998601069T |
申请日期 |
1998.03.11 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
IIDA, MAKOTO;IINO, EIICHI;KIMURA, MASANORI;MURAOKA, SHOZO |
分类号 |
C30B15/30;C30B15/32;C30B29/06;H01L21/208;(IPC1-7):C30B29/06 |
主分类号 |
C30B15/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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